Orders for Japanese-made semiconductor manufacturing equipment rose 2.7-fold in November from a year earlier to 151.1 billion yen, the Semiconductor Equipment Association of Japan said Monday.
The figure, which includes exports, marks the sixth consecutive monthly increase.
It reflects strong domestic demand, with sales of digital cameras and other digital home electronic products having remained strong, the industry body said.
The association added that the surge in orders followed industrywide curbs on equipment investment in fiscal 2001 and 2002.